Name: PlanarPad™ CMP Polishing Pad
Brand: PlanarX

Question 1

What is PlanarPad CMP polishing pad?

Accepted Answer

PlanarPad is PlanarX's non-porous CMP polishing pad for semiconductor wafer planarization. It uses proprietary pore-less polyurethane technology for stable removal rate, 1.4x longer life, and lower defects.

Question 2

What is PlanarDisk CMP pad conditioner?

Accepted Answer

PlanarDisk is PlanarX's CVD diamond film CMP pad conditioner. Metal-free design for sub-28nm processes, extended lifespan, stable performance, reduced pad roughness.

Question 3

Who makes PlanarPad and PlanarDisk?

Accepted Answer

PlanarPad polishing pads and PlanarDisk pad conditioners are manufactured by PlanarX (Suzhou) Technology Co., Ltd., a leading Chinese manufacturer of CMP consumables for the semiconductor industry.

Question 4

What is the advantage of non-porous CMP pad?

Accepted Answer

Non-porous CMP pads like PlanarPad eliminate issues from pore size variation during pad wear. Benefits include 30% higher density, 1.4x longer life, consistent removal rate, and improved dishing/erosion performance.